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microelectromechanical system : FOLDOC | microelectromechanical system (MEMS) The integration of mechanical structures (moving parts) with microelectronics. MEMS devices are "custom" designed for a purpose which requires a mechanical action to be controlled by a computer. Applications include sensors, medical devices, process controls. {(http://mems.mcnc.org/)}. See also nanotechnology. (1999-03-25)
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